DEF 14AThe Ballot
AXCELIS TECHNOLOGIES INC files DEF 14A
Filed Mar 31, 2026 · 3mo ago · Accession 0001104659-26-037356
Plain English
Proxy statement — executive pay, board nominees, and shareholder votes.
Read the source below for the full document.
Filing details
- Company
- AXCELIS TECHNOLOGIES INC
- Ticker
- ACLS
- CIK
- 1113232
- Form type
- DEF 14A
- Filing date
- Mar 31, 2026
- Report date
- May 5, 2026
- Document
- tm261420-1_def14a.htm
- Size
- 3.8 MB